Mass Dependence of the Sputtering Yield —Boundary Effect

Masatoshi Imada*

*この研究の対応する著者

研究成果: Article査読

5 被引用数 (Scopus)

抄録

A simple model is used to study the dependence of the sputtering yield on the incident atomic number (Z1). Scatterings between incident and target atoms are classified into two types, that is, large and small angle scatterings. Large angle scatterings are represented by random walks with a certain energy loss and small angle scatterings by another certain energy loss. The range distribution derived from this model is compared with other rigorous calculations. Sigmund's theory considerably overestimates the sputtering yield in the region where M2≫M1, M1 and M2 the mass of incident and target atoms respectively. Our simple model explains this as a surface boundary effect, i.e., as an effect due to escaping of energetic atoms from the surface.

本文言語English
ページ(範囲)1957-1964
ページ数8
ジャーナルjournal of the physical society of japan
45
6
DOI
出版ステータスPublished - 1978 1 1
外部発表はい

ASJC Scopus subject areas

  • 物理学および天文学(全般)

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