Measurement of anisotropic biaxial stresses in si1xgex/si mesa structures by oil-immersion raman spectroscopy

Daisuke Kosemura, Motohiro Tomita, Koji Usuda, Tsutomu Tezuka, Atsushi Ogura

研究成果: Article

5 引用 (Scopus)

抄録

Anisotropic biaxial stress states in Si1xGex /Si mesa structures were evaluated by oil-immersion Raman spectroscopy. Using a high-numericalaperture lens, the electrical field component perpendicular to the surface, i.e., z-polarization, can be obtained. The z-polarization enables the excitation of the forbidden optical phonon mode, i.e., the transverse optical (TO) phonon mode, even under the backscattering geometry from (001)-oriented diamond-type crystals. The anisotropic biaxial stress evaluation of Si1xGex was considered difficult compared with that of Si, because many unknown parameters exist for Si1xGex , e.g., phonon deformation potentials (PDPs), the Ge concentration x, and the factor of Raman shift on x. In this study, PDPs and the Ge concentration in Si1xGex were investigated in detail. As a result, using precise PDPs and x, a clear dependence of anisotropic biaxial stress states in Si1xGex on the mesa structure shape was observed.

元の言語English
記事番号04CA05
ジャーナルJapanese Journal of Applied Physics
52
発行部数4 PART 2
DOI
出版物ステータスPublished - 2013 4 1
外部発表Yes

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mesas
submerging
Raman spectroscopy
oils
Polarization
polarization
Backscattering
Lenses
Diamonds
backscattering
diamonds
lenses
Crystals
Geometry
evaluation
shift
geometry
excitation
crystals
Oils

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

これを引用

Measurement of anisotropic biaxial stresses in si1xgex/si mesa structures by oil-immersion raman spectroscopy. / Kosemura, Daisuke; Tomita, Motohiro; Usuda, Koji; Tezuka, Tsutomu; Ogura, Atsushi.

:: Japanese Journal of Applied Physics, 巻 52, 番号 4 PART 2, 04CA05, 01.04.2013.

研究成果: Article

Kosemura, Daisuke ; Tomita, Motohiro ; Usuda, Koji ; Tezuka, Tsutomu ; Ogura, Atsushi. / Measurement of anisotropic biaxial stresses in si1xgex/si mesa structures by oil-immersion raman spectroscopy. :: Japanese Journal of Applied Physics. 2013 ; 巻 52, 番号 4 PART 2.
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