Measurement of extreme-high-vacuum pressure by laser ionization

Kiyohide Kokubun, Shingo Ichimura, Shigeyuki Sekine, Hazime Shimizu

研究成果: Article

3 引用 (Scopus)

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Measurement of gas pressure using nonresonant multiphoton ionization has been performed. As a result, ex-treme-high-vacuum (XHV) pressure to 7 x 10-10Pa was successfully measured by this method. The experimental results are presented, and problems related to noise are discussed.

元の言語English
ページ(範囲)L1109-L1111
ジャーナルJapanese journal of applied physics
32
発行部数8 A
DOI
出版物ステータスPublished - 1993 8

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ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

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