TY - JOUR
T1 - Measurement of outgassing characteristics from a vacuum chamber fabricated for pressure calibration in UHV/XHV region
AU - Ichimura, Shingo
AU - Kokubun, Kiyohide
AU - Hirata, Masahiro
AU - Tsukahara, Sonoko
AU - Saito, Kzuya
AU - Ikeda, Yoshinao
PY - 1999/5
Y1 - 1999/5
N2 - The construction of a new vacuum system fabricated for pressure calibration in UHV/XHV region is explained together with the measurement of outgassing rate from an XHV chamber used in the system. The outgassing rate was measured using a test chamber by a throughput method after each treatment of the chamber surface such as electrolytic polishing, pre-baking in vacuum, and TiN coating. It was found that the outgassing rate of 3.7 × 10-9 Pa m s-1 after electrolytical polishing could be reduced to 1.0 × 10-13 Pa m s-1 after pre-baking twice followed by TiN coating. The outgassing rate was also measured by the pressure rise method using the whole XHV chamber, and the result was compared with that obtained with the test chamber.
AB - The construction of a new vacuum system fabricated for pressure calibration in UHV/XHV region is explained together with the measurement of outgassing rate from an XHV chamber used in the system. The outgassing rate was measured using a test chamber by a throughput method after each treatment of the chamber surface such as electrolytic polishing, pre-baking in vacuum, and TiN coating. It was found that the outgassing rate of 3.7 × 10-9 Pa m s-1 after electrolytical polishing could be reduced to 1.0 × 10-13 Pa m s-1 after pre-baking twice followed by TiN coating. The outgassing rate was also measured by the pressure rise method using the whole XHV chamber, and the result was compared with that obtained with the test chamber.
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U2 - 10.1016/S0042-207X(98)00373-X
DO - 10.1016/S0042-207X(98)00373-X
M3 - Conference article
AN - SCOPUS:0033131192
SN - 0042-207X
VL - 53
SP - 291
EP - 294
JO - Vacuum
JF - Vacuum
IS - 1-2
T2 - Proceedings of the 1998 14th International Vaccum Congress 10th International Conference on Solid Surfaces 5th International Conference on Nanometre-Scale Science and Technology 10th International Conference on Quantitative Surface Analysis
Y2 - 31 August 1998 through 4 September 1998
ER -