This paper reports on the fabrication and characterization of MEMS-scale devices from a mechanically dynamic polymer nanocomposite, consisting of a cotton-derived cellulose nanofibers encased in a poly(vinyl acetate) matrix, with a stiffness modulated by the presence or absence of water. Microtensile testing showed that the Young's modulus (E) of the nanocomposite is initially ∼2.7 GPa, but reduces to ∼4 MPa upon immersion in water for 7 minutes. A combination of laser-micromachining and lithographic processing was used to produce an intracortical probe with switchable stiffness based on the dynamic nanocomposite. An electrode with area 2800 μm2 was found to have an impedance of 156 kΩ at 1 kHz. This investigation was the first time that a chemoresponsive nanocomposite based on cotton cellulose nanofibers was used in MEMS-scale structures.
|ホスト出版物のタイトル||2011 IEEE 24th International Conference on Micro Electro Mechanical Systems, MEMS 2011|
|出版ステータス||Published - 2011|
|イベント||24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011 - Cancun|
継続期間: 2011 1月 23 → 2011 1月 27
|Other||24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011|
|Period||11/1/23 → 11/1/27|
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