TY - GEN
T1 - Membrane InP-based Modulator and Laser on Si
AU - Hiraki, Tatsurou
AU - Aihara, Takuma
AU - Fujii, Takuro
AU - Takeda, Koji
AU - Maeda, Yoshiho
AU - Tsuchizawa, Tai
AU - Kakitsuka, Takaaki
AU - Takahata, Kiyoto
AU - Matsuo, Shinji
N1 - Publisher Copyright:
© 2021 IEEE.
PY - 2021
Y1 - 2021
N2 - We review membrane InP-based modulators and a laser, which are fabricated by combining wafer bonding and epitaxial regrowth of materials with different bandgaps on Si. We demonstrate a high-efficiency Mach-Zehnder modulator integrated with a distributed feedback laser and high-speed electro-absorption modulator on Si-waveguide circuits.
AB - We review membrane InP-based modulators and a laser, which are fabricated by combining wafer bonding and epitaxial regrowth of materials with different bandgaps on Si. We demonstrate a high-efficiency Mach-Zehnder modulator integrated with a distributed feedback laser and high-speed electro-absorption modulator on Si-waveguide circuits.
KW - Heterogeneous integration
KW - laser
KW - modulator
UR - http://www.scopus.com/inward/record.url?scp=85124702413&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=85124702413&partnerID=8YFLogxK
U2 - 10.1109/GFP51802.2021.9673814
DO - 10.1109/GFP51802.2021.9673814
M3 - Conference contribution
AN - SCOPUS:85124702413
T3 - IEEE International Conference on Group IV Photonics GFP
BT - 2021 IEEE 17th International Conference on Group IV Photonics, GFP 2021 - Proceedings
PB - IEEE Computer Society
T2 - 17th IEEE International Conference on Group IV Photonics, GFP 2021
Y2 - 7 December 2021 through 10 December 2021
ER -