MEMS-based design and fabrication of a new concept micro direct methanol fuel cell (μ-DMFC)

Shinji Motokawa, Mohamed Mohamedi, Toshiyuki Momma, Shuichi Shoji, Tetsuya Osaka

研究成果: Article

172 引用 (Scopus)

抄録

A design for a novel micro direct methanol fuel cell (μ-DMFC) of 0.018 cm2 active area is described. The μ-DMFC was prepared using a series of fabrication steps from micro-machined silicon wafer including photolithography, deep reactive ion etching, and electron beam deposition. The novelty of this structure is that we have fabricated the anodic and cathodic micro-channels arranged in plane, dissimilar to the conventional bipolar structure. The first objective of the experimental trials was to verify the feasibility of this novel structure on basis of MEMS technology. Preliminary testing results show that this new concept μ-DMFC generates electricity.

元の言語English
ページ(範囲)562-565
ページ数4
ジャーナルElectrochemistry Communications
6
発行部数6
DOI
出版物ステータスPublished - 2004 6

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Direct methanol fuel cells (DMFC)
MEMS
Fabrication
Reactive ion etching
Photolithography
Silicon wafers
Electron beams
Electricity
Testing

ASJC Scopus subject areas

  • Chemical Engineering(all)
  • Analytical Chemistry
  • Electrochemistry

これを引用

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AU - Osaka, Tetsuya

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