TY - GEN
T1 - MEMS fabricated liquid chromatography microchip for practical uses
AU - Noguchi, Masao
AU - Tsunoda, Makoto
AU - Mizuno, Jun
AU - Funatsu, Takashi
AU - Shoji, Shuichi
PY - 2010/6/1
Y1 - 2010/6/1
N2 - A microfabricated pillar array separation column which has a comparable theoretical plate number to the conventional packed column was fabricated on a silicon chip. The column has a folded separation microchannel with compensated narrow curve structures which have inner and outer paths of the same length. This geometry minimizes the turn-induced band broadening and achieves high separation efficiency. The liquid chromatography (LC) microchip was fabricated on the 20 mm x 20 mm silicon chip using a column of 110 mm in length. The theoretical plate number is approximately 8000 (typical packed column: 5000-18000) and the plate heights are 10.4 ?m (typical packed column: 14-20 μm). These results show that the microfabricated LC microchip is suitable for practical uses.
AB - A microfabricated pillar array separation column which has a comparable theoretical plate number to the conventional packed column was fabricated on a silicon chip. The column has a folded separation microchannel with compensated narrow curve structures which have inner and outer paths of the same length. This geometry minimizes the turn-induced band broadening and achieves high separation efficiency. The liquid chromatography (LC) microchip was fabricated on the 20 mm x 20 mm silicon chip using a column of 110 mm in length. The theoretical plate number is approximately 8000 (typical packed column: 5000-18000) and the plate heights are 10.4 ?m (typical packed column: 14-20 μm). These results show that the microfabricated LC microchip is suitable for practical uses.
UR - http://www.scopus.com/inward/record.url?scp=77952764332&partnerID=8YFLogxK
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U2 - 10.1109/MEMSYS.2010.5442355
DO - 10.1109/MEMSYS.2010.5442355
M3 - Conference contribution
AN - SCOPUS:77952764332
SN - 9781424457649
T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
SP - 911
EP - 914
BT - MEMS 2010 - The 23rd IEEE International Conference on Micro Electro Mechanical Systems, Technical Digest
T2 - 23rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2010
Y2 - 24 January 2010 through 28 January 2010
ER -