MEMS fabricated liquid chromatography microchip for practical uses

Masao Noguchi*, Makoto Tsunoda, Jun Mizuno, Takashi Funatsu, Shuichi Shoji

*この研究の対応する著者

研究成果: Conference contribution

1 被引用数 (Scopus)

抄録

A microfabricated pillar array separation column which has a comparable theoretical plate number to the conventional packed column was fabricated on a silicon chip. The column has a folded separation microchannel with compensated narrow curve structures which have inner and outer paths of the same length. This geometry minimizes the turn-induced band broadening and achieves high separation efficiency. The liquid chromatography (LC) microchip was fabricated on the 20 mm x 20 mm silicon chip using a column of 110 mm in length. The theoretical plate number is approximately 8000 (typical packed column: 5000-18000) and the plate heights are 10.4 ?m (typical packed column: 14-20 μm). These results show that the microfabricated LC microchip is suitable for practical uses.

本文言語English
ホスト出版物のタイトルMEMS 2010 - The 23rd IEEE International Conference on Micro Electro Mechanical Systems, Technical Digest
ページ911-914
ページ数4
DOI
出版ステータスPublished - 2010 6月 1
イベント23rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2010 - Hong Kong, China
継続期間: 2010 1月 242010 1月 28

出版物シリーズ

名前Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN(印刷版)1084-6999

Conference

Conference23rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2010
国/地域China
CityHong Kong
Period10/1/2410/1/28

ASJC Scopus subject areas

  • 電子材料、光学材料、および磁性材料
  • 凝縮系物理学
  • 機械工学
  • 電子工学および電気工学

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