MEMS LC microchip with low dispersion and low pressure drop turn structure using distribution controlled micro pillar array

K. Takatsuki, M. Isokawa, Y. Song, A. Nakahara, D. H. Yoon, T. Sekiguchi, J. Mizuno, T. Funatsu, M. Tsunoda, S. Shoji

研究成果: Conference contribution

1 引用 (Scopus)

抜粋

MEMS liquid chromatography (LC) microchip with low dispersion and a low pressure drop turn structure was fabricated. In the turn structure, we used higher density pillar array at the inner side while lower density pillar array was used at the outer side to control inner and outer speed of a sample flow. An LC chip with an improved turn structure can obtain similar theoretical plate number (1233) compared to the previously proposed tapered turn (1135). The necessary inlet pressure is also reduced from 2.7 to 0.4 MPa under a flow rate of 10 μL/min. These results show the improved turn structure is applicable for fast analysis time under high flow rate conditions.

元の言語English
ホスト出版物のタイトルIEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013
ページ981-984
ページ数4
DOI
出版物ステータスPublished - 2013 4 2
イベントIEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013 - Taipei, Taiwan, Province of China
継続期間: 2013 1 202013 1 24

出版物シリーズ

名前Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN(印刷物)1084-6999

Conference

ConferenceIEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013
Taiwan, Province of China
Taipei
期間13/1/2013/1/24

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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  • これを引用

    Takatsuki, K., Isokawa, M., Song, Y., Nakahara, A., Yoon, D. H., Sekiguchi, T., Mizuno, J., Funatsu, T., Tsunoda, M., & Shoji, S. (2013). MEMS LC microchip with low dispersion and low pressure drop turn structure using distribution controlled micro pillar array. : IEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013 (pp. 981-984). [6474411] (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). https://doi.org/10.1109/MEMSYS.2013.6474411