Metallization on 3-D microstructures using spray coating for high performance micro direct methanol fuel cell (μDMFC)

Hiroaki Houjou*, Shinji Motokawa, Masanori Ishizuka, Jun Mizuno, Toshiyuki Momma, Tetsuya Osaka, Shuichi Shoji

*この研究の対応する著者

研究成果: Conference contribution

2 被引用数 (Scopus)

抄録

High efficient micro electrochemical devices are realized by the increase of the electrode surface areas keeping the chip size. Use of the 3-D electrodes instead of the planar electrodes is quite effective for this purpose. To realize a metal pattern on 3-D structures, spray coating method was utilized and the optimum condition to achieve good step coverage was observed. Good step coverage of photoresist was obtained on the obtuse corner formed by anisotropic wet etching of (100) silicon and even vertical comer formed by deep RIE. We applied this method to fabricate a high performance micro direct methanol fuel cell (μDMFC). The open circuit voltage of 548mV and the maximum power density of 0.72mW/cm2 were obtained at room temperature with 2M methanol.

本文言語English
ホスト出版物のタイトルTRANSDUCERS '05 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems - Digest of Technical Papers
ページ1437-1440
ページ数4
DOI
出版ステータスPublished - 2005 11 9
イベント13th International Conference on Solid-State Sensors and Actuators and Microsystems, TRANSDUCERS '05 - Seoul, Korea, Republic of
継続期間: 2005 6 52005 6 9

出版物シリーズ

名前Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05
2

Conference

Conference13th International Conference on Solid-State Sensors and Actuators and Microsystems, TRANSDUCERS '05
国/地域Korea, Republic of
CitySeoul
Period05/6/505/6/9

ASJC Scopus subject areas

  • 工学(全般)

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