Metallization on three dimensions microstructures using photoresist spray coating for microdirect methanol fuel cell

Masanori Ishizuka, Hiroaki Houjou, Shinji Motokawa, Jun Mizuno, Toshiyuki Momma, Tetsuya Osaka, Shuichi Shoji

研究成果: Article

10 引用 (Scopus)

抄録

High-efficientcy micro-electrochemical devices are realized by increasing electrode surface areas while maintaining keeping chip size. The use of three dimensional (3-D) electrodes instead of planar electrodes is effective for this purpose. To realize a metal pattern on 3-D structures, spray coating was utilized and the optimum condition for achieving a good photoresist step coverage was determined. A good step coverage of the photoresist was obtained on the obtuse corner formed by the anisotropic wet etching of (100) silicon and even on the vertical corner formed by deep reactive ion etching (RIE). We applied this method to fabricate a high-performance micro direct methanol fuel cell (μDMFC). An open circuit voltage of 548 mV and a maximum power density of 0.72 mW/cm2 were obtained at room temperature with 2 M methanol.

元の言語English
ページ(範囲)7944-7948
ページ数5
ジャーナルJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
45
発行部数10 A
DOI
出版物ステータスPublished - 2006 10 15

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Methanol fuels
Photoresists
Metallizing
photoresists
fuel cells
sprayers
coating
Fuel cells
methyl alcohol
Coatings
microstructure
Microstructure
Electrodes
electrodes
etching
Anisotropic etching
Direct methanol fuel cells (DMFC)
Wet etching
Reactive ion etching
Open circuit voltage

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

これを引用

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abstract = "High-efficientcy micro-electrochemical devices are realized by increasing electrode surface areas while maintaining keeping chip size. The use of three dimensional (3-D) electrodes instead of planar electrodes is effective for this purpose. To realize a metal pattern on 3-D structures, spray coating was utilized and the optimum condition for achieving a good photoresist step coverage was determined. A good step coverage of the photoresist was obtained on the obtuse corner formed by the anisotropic wet etching of (100) silicon and even on the vertical corner formed by deep reactive ion etching (RIE). We applied this method to fabricate a high-performance micro direct methanol fuel cell (μDMFC). An open circuit voltage of 548 mV and a maximum power density of 0.72 mW/cm2 were obtained at room temperature with 2 M methanol.",
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AU - Ishizuka, Masanori

AU - Houjou, Hiroaki

AU - Motokawa, Shinji

AU - Mizuno, Jun

AU - Momma, Toshiyuki

AU - Osaka, Tetsuya

AU - Shoji, Shuichi

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KW - μDmfc

KW - 3-d electrode

KW - 3-d microfabrication

KW - Fuel cell

KW - Spray coating

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