抄録
High-efficientcy micro-electrochemical devices are realized by increasing electrode surface areas while maintaining keeping chip size. The use of three dimensional (3-D) electrodes instead of planar electrodes is effective for this purpose. To realize a metal pattern on 3-D structures, spray coating was utilized and the optimum condition for achieving a good photoresist step coverage was determined. A good step coverage of the photoresist was obtained on the obtuse corner formed by the anisotropic wet etching of (100) silicon and even on the vertical corner formed by deep reactive ion etching (RIE). We applied this method to fabricate a high-performance micro direct methanol fuel cell (μDMFC). An open circuit voltage of 548 mV and a maximum power density of 0.72 mW/cm2 were obtained at room temperature with 2 M methanol.
| 元の言語 | English |
|---|---|
| ページ（範囲） | 7944-7948 |
| ページ数 | 5 |
| ジャーナル | Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers |
| 巻 | 45 |
| 発行部数 | 10 A |
| DOI | |
| 出版物ステータス | Published - 2006 10 15 |
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ASJC Scopus subject areas
- Physics and Astronomy (miscellaneous)
これを引用
Metallization on three dimensions microstructures using photoresist spray coating for microdirect methanol fuel cell. / Ishizuka, Masanori; Houjou, Hiroaki; Motokawa, Shinji; Mizuno, Jun; Momma, Toshiyuki; Osaka, Tetsuya; Shoji, Shuichi.
：: Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, 巻 45, 番号 10 A, 15.10.2006, p. 7944-7948.研究成果: Article
}
TY - JOUR
T1 - Metallization on three dimensions microstructures using photoresist spray coating for microdirect methanol fuel cell
AU - Ishizuka, Masanori
AU - Houjou, Hiroaki
AU - Motokawa, Shinji
AU - Mizuno, Jun
AU - Momma, Toshiyuki
AU - Osaka, Tetsuya
AU - Shoji, Shuichi
PY - 2006/10/15
Y1 - 2006/10/15
N2 - High-efficientcy micro-electrochemical devices are realized by increasing electrode surface areas while maintaining keeping chip size. The use of three dimensional (3-D) electrodes instead of planar electrodes is effective for this purpose. To realize a metal pattern on 3-D structures, spray coating was utilized and the optimum condition for achieving a good photoresist step coverage was determined. A good step coverage of the photoresist was obtained on the obtuse corner formed by the anisotropic wet etching of (100) silicon and even on the vertical corner formed by deep reactive ion etching (RIE). We applied this method to fabricate a high-performance micro direct methanol fuel cell (μDMFC). An open circuit voltage of 548 mV and a maximum power density of 0.72 mW/cm2 were obtained at room temperature with 2 M methanol.
AB - High-efficientcy micro-electrochemical devices are realized by increasing electrode surface areas while maintaining keeping chip size. The use of three dimensional (3-D) electrodes instead of planar electrodes is effective for this purpose. To realize a metal pattern on 3-D structures, spray coating was utilized and the optimum condition for achieving a good photoresist step coverage was determined. A good step coverage of the photoresist was obtained on the obtuse corner formed by the anisotropic wet etching of (100) silicon and even on the vertical corner formed by deep reactive ion etching (RIE). We applied this method to fabricate a high-performance micro direct methanol fuel cell (μDMFC). An open circuit voltage of 548 mV and a maximum power density of 0.72 mW/cm2 were obtained at room temperature with 2 M methanol.
KW - μDmfc
KW - 3-d electrode
KW - 3-d microfabrication
KW - Fuel cell
KW - Spray coating
UR - http://www.scopus.com/inward/record.url?scp=34547888028&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=34547888028&partnerID=8YFLogxK
U2 - 10.1143/JJAP.45.7944
DO - 10.1143/JJAP.45.7944
M3 - Article
AN - SCOPUS:34547888028
VL - 45
SP - 7944
EP - 7948
JO - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
JF - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
SN - 0021-4922
IS - 10 A
ER -