It has been clarified that probe current decreases linearly with increasing deposition time of a SiN film on a probe. From this result, a probe current-voltage characteristic without any deposition of the SiN film can be extrapolated from some probe current-voltage characteristics of different deposition times of the SiN film.
|ジャーナル||Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers|
|出版ステータス||Published - 1994 1|
ASJC Scopus subject areas
- Physics and Astronomy (miscellaneous)