Method of probe measurement in N2SiH4 microwave plasma

Isamu Kato, Tadashi Sakamoto, Tsuyoshi Shimoda

研究成果: Article査読

5 被引用数 (Scopus)

抄録

It has been clarified that probe current decreases linearly with increasing deposition time of a SiN film on a probe. From this result, a probe current-voltage characteristic without any deposition of the SiN film can be extrapolated from some probe current-voltage characteristics of different deposition times of the SiN film.

本文言語English
ページ(範囲)307-310
ページ数4
ジャーナルJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
33
1 A
出版ステータスPublished - 1994 1

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

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