A micro chamber integrated with an extremely low dead volume sample injector for real-time monitoring of living cell was developed. By means of the combination of isotropic etching and deep trench etching using CCP-RIE and ICP-RIE, the sample injector with negligible dead volume of less than 0.05nl is realized. Using fabricated devices, the reproducible sample injection of the order of 1nl was obtained. Biological cell culture of rat mast cell was also performed in the fabricated micro chamber.
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