Micro Flow Devices

Shuichi Shoji, Takahiro Arakawa, Masaki Kanai, Hironobu Sato

研究成果: Article › 査読

1 被引用数 (Scopus)

本文言語	English
ページ（範囲）	395-399
ページ数	5
ジャーナル	Shinku/Journal of the Vacuum Society of Japan
巻	49
号	7
DOI	https://doi.org/10.3131/jvsj.49.395
出版ステータス	Published - 2006 1月

ASJC Scopus subject areas

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