Micro liquid prism

Y. Yoshihata, A. Takei, N. Binh Khiem, T. Kan, E. Iwase

研究成果: Conference article査読

9 被引用数 (Scopus)

抄録

This paper presents a micro liquid prism. Two flat transparent plates float on a liquid droplet and these plates serve as prism faces. The two plates are positioned automatically by surface tension, just by putting the plates on the ellipsoidal droplet. Therefore the proposed prism can be fabricated accurately in micro scale without difficulty. As the liquid and the plates are encapsulated by Parylene, the prism can retain its shape. The prism which faces were 400ptm in diameter and whole size was smaller than 1mm3 was fabricated. The adequate function of the fabricated prism for Surface Plasmon Resonance (SPR) measurement was verified.

本文言語English
論文番号4805546
ページ(範囲)967-970
ページ数4
ジャーナルProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
DOI
出版ステータスPublished - 2009 6 1
外部発表はい
イベント22nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2009 - Sorrento, Italy
継続期間: 2009 1 252009 1 29

ASJC Scopus subject areas

  • 電子材料、光学材料、および磁性材料
  • 凝縮系物理学
  • 機械工学
  • 電子工学および電気工学

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