Microfabrication and microsensors

Shuichi Shoji, Masayoshi Esashi

研究成果: Article

10 引用 (Scopus)

抜粋

In order to fabricate microsensors, a micromachining, microfabrication technique based on LSI technologies has been used. In this paper, useful micromachining techniques are described. Examples of integrated microsensors, such as a pressure sensor including a readout circuit and a multisensor cell for blood gas analysis, are introduced. Microflow control devices, such as a microvalve and a micropump for integrated chemical analysis systems, are also described.

元の言語English
ページ(範囲)21-34
ページ数14
ジャーナルApplied Biochemistry and Biotechnology
41
発行部数1-2
DOI
出版物ステータスPublished - 1993 4 1

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ASJC Scopus subject areas

  • Biotechnology
  • Bioengineering
  • Biochemistry
  • Applied Microbiology and Biotechnology
  • Molecular Biology

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