Microfabrication technologies and micro-flow devices for chemical and bio-chemical micro flow systems

Shuichi Shoji*

*この研究の対応する著者

研究成果: Conference contribution

8 被引用数 (Scopus)

抄録

Micromachining, based on photolithography commonly used in integrated circuit technology, has been applied to miniaturize chemical and bio-chemical analysis systems. Micro/miniaturized total analysis systems (μTAS), developed so far, can be classified into two groups. One is a MEMS-type system using pressurized flow by mechanical flow control devices, for example, microvalves and micropumps. The other uses electrically driven liquid handling without mechanical elements. Typically electroosmotic flow has been used so far. Planar capillary electrophoresis (chip CE) type systems are the common application of this method. Microfabrication technologies and micro flow control devices applied to the chemical and biochemical micro flow systems are reviewed.

本文言語English
ホスト出版物のタイトル1999 International Microprocesses and Nanotechnology Conference
出版社Institute of Electrical and Electronics Engineers Inc.
ページ72-73
ページ数2
ISBN(電子版)4930813972, 9784930813978
DOI
出版ステータスPublished - 1999 1 1
イベント1999 International Microprocesses and Nanotechnology Conference - Yokohama, Japan
継続期間: 1999 7 61999 7 8

出版物シリーズ

名前1999 International Microprocesses and Nanotechnology Conference

Other

Other1999 International Microprocesses and Nanotechnology Conference
国/地域Japan
CityYokohama
Period99/7/699/7/8

ASJC Scopus subject areas

  • 電子工学および電気工学
  • 電子材料、光学材料、および磁性材料

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