Microfabrication technologies and micro-flow devices for chemical and bio-chemical micro flow systems

研究成果: Conference contribution

8 引用 (Scopus)

抜粋

Micromachining, based on photolithography commonly used in integrated circuit technology, has been applied to miniaturize chemical and bio-chemical analysis systems. Micro/miniaturized total analysis systems (μTAS), developed so far, can be classified into two groups. One is a MEMS-type system using pressurized flow by mechanical flow control devices, for example, microvalves and micropumps. The other uses electrically driven liquid handling without mechanical elements. Typically electroosmotic flow has been used so far. Planar capillary electrophoresis (chip CE) type systems are the common application of this method. Microfabrication technologies and micro flow control devices applied to the chemical and biochemical micro flow systems are reviewed.

元の言語English
ホスト出版物のタイトル1999 International Microprocesses and Nanotechnology Conference
出版者Institute of Electrical and Electronics Engineers Inc.
ページ72-73
ページ数2
ISBN(電子版)4930813972, 9784930813978
DOI
出版物ステータスPublished - 1999 1 1
イベント1999 International Microprocesses and Nanotechnology Conference - Yokohama, Japan
継続期間: 1999 7 61999 7 8

出版物シリーズ

名前1999 International Microprocesses and Nanotechnology Conference

Other

Other1999 International Microprocesses and Nanotechnology Conference
Japan
Yokohama
期間99/7/699/7/8

    フィンガープリント

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials

これを引用

Shoji, S. (1999). Microfabrication technologies and micro-flow devices for chemical and bio-chemical micro flow systems. : 1999 International Microprocesses and Nanotechnology Conference (pp. 72-73). [797482] (1999 International Microprocesses and Nanotechnology Conference). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/IMNC.1999.797482