Microflow devices and systems

Shuchi Shoji, Masayoshi Esashi

研究成果: Article査読

411 被引用数 (Scopus)

抄録

Microflow devices including microvalves, micropumps and microflow sensors fabricated by micromachining are reviewed from the point of view of the actuating principle and structures. Integration of microflow control devices and microflow sensors allowed very precise control of small flow. High performance liquid dosing microsystems and sophisticated chemical analysing microsystems were demonstrated by the combination of microflow devices and microsensors. Applications of microflow devices and systems are also introduced.

本文言語English
論文番号001
ページ(範囲)157-171
ページ数15
ジャーナルJournal of Micromechanics and Microengineering
4
4
DOI
出版ステータスPublished - 1994
外部発表はい

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Mechanics of Materials
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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