Micromachined flow sensor for fuel injection

Yoshitaka Kanai, Jun Mizuno, Kay Nottmeyer, Takashi Kobayashi

研究成果: Conference article

3 引用 (Scopus)


This paper presents the structure, operation principle, and fabrication process of a novel type of flow-velocity sensor. Like the well known classical Pitot (Prandtl) tube, it realizes flow velocity detection by measurement of the pressure difference between stagnant fluid pressure in front of the sensor and static pressure in the flow around the sensor. This difference results in a deflection of a diaphragm suspended boss, that serves as the counter electrode of an integrated capacitor which is directly exposed to the fluid to be measured. Experimental results in the wind tunnel and in the gasoline direct injection experimental set-up confirm the sensor's operation principle and show good time response.

ジャーナルSAE Technical Papers
出版物ステータスPublished - 2000 1 1
イベントSAE 2000 World Congress - Detroit, MI, United States
継続期間: 2000 3 62000 3 9


ASJC Scopus subject areas

  • Automotive Engineering
  • Safety, Risk, Reliability and Quality
  • Pollution
  • Industrial and Manufacturing Engineering