抄録
This paper presents the structure, operation principle, and fabrication process of a novel type of flow-velocity sensor. Like the well known classical Pitot (Prandtl) tube, it realizes flow velocity detection by measurement of the pressure difference between stagnant fluid pressure in front of the sensor and static pressure in the flow around the sensor. This difference results in a deflection of a diaphragm suspended boss, that serves as the counter electrode of an integrated capacitor which is directly exposed to the fluid to be measured. Experimental results in the wind tunnel and in the gasoline direct injection experimental set-up confirm the sensor's operation principle and show good time response.
| 元の言語 | English |
|---|---|
| ジャーナル | SAE Technical Papers |
| DOI | |
| 出版物ステータス | Published - 2000 1 1 |
| イベント | SAE 2000 World Congress - Detroit, MI, United States 継続期間: 2000 3 6 → 2000 3 9 |
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ASJC Scopus subject areas
- Automotive Engineering
- Safety, Risk, Reliability and Quality
- Pollution
- Industrial and Manufacturing Engineering
これを引用
Micromachined flow sensor for fuel injection. / Kanai, Yoshitaka; Mizuno, Jun; Nottmeyer, Kay; Kobayashi, Takashi.
：: SAE Technical Papers, 01.01.2000.研究成果: Conference article
}
TY - JOUR
T1 - Micromachined flow sensor for fuel injection
AU - Kanai, Yoshitaka
AU - Mizuno, Jun
AU - Nottmeyer, Kay
AU - Kobayashi, Takashi
PY - 2000/1/1
Y1 - 2000/1/1
N2 - This paper presents the structure, operation principle, and fabrication process of a novel type of flow-velocity sensor. Like the well known classical Pitot (Prandtl) tube, it realizes flow velocity detection by measurement of the pressure difference between stagnant fluid pressure in front of the sensor and static pressure in the flow around the sensor. This difference results in a deflection of a diaphragm suspended boss, that serves as the counter electrode of an integrated capacitor which is directly exposed to the fluid to be measured. Experimental results in the wind tunnel and in the gasoline direct injection experimental set-up confirm the sensor's operation principle and show good time response.
AB - This paper presents the structure, operation principle, and fabrication process of a novel type of flow-velocity sensor. Like the well known classical Pitot (Prandtl) tube, it realizes flow velocity detection by measurement of the pressure difference between stagnant fluid pressure in front of the sensor and static pressure in the flow around the sensor. This difference results in a deflection of a diaphragm suspended boss, that serves as the counter electrode of an integrated capacitor which is directly exposed to the fluid to be measured. Experimental results in the wind tunnel and in the gasoline direct injection experimental set-up confirm the sensor's operation principle and show good time response.
KW - air flow
KW - Bosch-type flow rate meter
KW - flow sensor
KW - fuel injection
KW - liquid flow
KW - micromachine
KW - silicon
UR - http://www.scopus.com/inward/record.url?scp=85072462005&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=85072462005&partnerID=8YFLogxK
U2 - 10.4271/2000-01-1365
DO - 10.4271/2000-01-1365
M3 - Conference article
AN - SCOPUS:85072462005
JO - SAE Technical Papers
JF - SAE Technical Papers
SN - 0148-7191
ER -