抄録
The flow-induced vibration of the microcantilever is investigated. In particular, to avoid flow disturbance resulting from size of measuring probe, we use the monolithic boron-doped piezoresistive microsensors. By characterizing the dynamic behavior of the microcantilever, the new micromechanics is experimentally determined, completely different from the conventional mechanics in the flow-induced vibration.
| 本文言語 | English |
|---|---|
| ページ（範囲） | 510-512 |
| ページ数 | 3 |
| ジャーナル | ieej transactions on sensors and micromachines |
| 巻 | 123 |
| 号 | 11 |
| DOI | |
| 出版ステータス | Published - 2003 |
ASJC Scopus subject areas
- 機械工学
- 電子工学および電気工学