Micromechanical Characterization of Self-Oscillating Microcantilever Using Piezoresistive Microsensors

Jeung Sang Go, Shuichi Shoji

研究成果: Article査読

抄録

The flow-induced vibration of the microcantilever is investigated. In particular, to avoid flow disturbance resulting from size of measuring probe, we use the monolithic boron-doped piezoresistive microsensors. By characterizing the dynamic behavior of the microcantilever, the new micromechanics is experimentally determined, completely different from the conventional mechanics in the flow-induced vibration.

本文言語English
ページ(範囲)510-512
ページ数3
ジャーナルieej transactions on sensors and micromachines
123
11
DOI
出版ステータスPublished - 2003

ASJC Scopus subject areas

  • 機械工学
  • 電子工学および電気工学

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