@article{ff01832f202f48079c8f4ab1690cb566,
title = "Micro/nanofabrication of poly(L-lactic acid) using focused ion beam direct etching",
abstract = "Micro/nanofabrication of biocompatible and biodegradable poly( L-lactic acid) (PLLA) using focused Ga ion beam direct etching was evaluated for future bio-device applications. The fabrication performance was determined with different ion fluences and fluxes (beam currents), and it was found that the etching speed and fabrication accuracy were affected by irradiation-induced heat. Focused ion beam (FIB)-irradiated surfaces were analyzed using micro-area X-ray photoelectron spectroscopy. Owing to reactions such as the physical sputtering of atoms and radiation-induced decomposition, PLLA was gradually carbonized with increasing C=C bonds. Controlled micro/nanostructures of PLLA were fabricated with C=C bond-rich surfaces expected to have good cell attachment properties.",
author = "Oyama, {Tomoko Gowa} and Toru Hinata and Naotsugu Nagasawa and Akihiro Oshima and Masakazu Washio and Seiichi Tagawa and Mitsumasa Taguchi",
note = "Funding Information: The authors would like to thank Mr. Satoshi Okubo (Waseda University) for his fruitful discussion and Ms. Miki Kashiwakura for her technical support. T.G.O. acknowledges a Grant-in-Aid for JSPS Fellows 24-9069. N.N. acknowledges a Grant-in-Aid for Scientific Research (C) 24510132. A part of this work was supported by the Cooperative Research Programs entitled “Network Joint Research Center for Materials and Devices” (2012257), “Nanotechnology Platform Project (Nanotechnology Open Facilities in Osaka University)” (F-12-OS-0026 and F-13-OS-0023), organized by the Ministry of Education, Culture, Sports, Science and Technology, Japan.",
year = "2013",
month = oct,
day = "14",
doi = "10.1063/1.4825277",
language = "English",
volume = "103",
journal = "Applied Physics Letters",
issn = "0003-6951",
publisher = "American Institute of Physics Publising LLC",
number = "16",
}