Micropump and sample-injector for integrated chemical analyzing systems

Shuichi Shoji, Shigeru Nakagawa, Masayoshi Esashi

研究成果: Article査読

129 被引用数 (Scopus)

抄録

A dual pump and a buffer pump have been integrated on a silicon wafer for chemical analyzing systems. These pumps realize constant and rippleless liquid flow of a small volume. The controllable flow rate of the pumps was up to about 40 μl/min and the maximum pumping pressure was about 1 mH2O. A sample injector made up of two three-way valves has also been fabricated with micromachining.

本文言語English
ページ(範囲)189-192
ページ数4
ジャーナルSensors and Actuators: A. Physical
21
1-3
DOI
出版ステータスPublished - 1990 2
外部発表はい

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Electrical and Electronic Engineering

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