The microstructure and magnetic properties of a Co/Pd multilayer on a controlled Pd/Si seed layer for double-layered perpendicular magnetic recording media were studied. The Pd/Si seed layer, sputter deposited under Ar sputtering gas containing N2 and postannealed at 400°C reduced intergranular exchange coupling of the Co/Pd multilayered films. It was observed that the addition of N2 gas effectively decreased the grain size of Pd in the seed layer. It was found that the Pd/Si seed layer prepared with both processes exhibited a granular structure of fine Pd-rich grains surrounded by a Si-rich amorphous region.
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