Microwave atomic force microscopy: Quantitative measurement and characterization of electrical properties on the nanometer scale

Lan Zhang*, Yang Ju, Atsushi Hosoi, Akifumi Fujimoto

*この研究の対応する著者

研究成果: Article査読

12 被引用数 (Scopus)

抄録

In this paper, we report a noncontact and quantitative method of evaluating and characterizing electrical properties with a nanometer-scale spatial resolution. Microwave atomic force microscopy (M-AFM) can be used to obtain the topography and microwave image of materials in one scanning process simultaneously. Under the frequency modulation (FM) AFM mode, we successfully applied M-AFM to create a microwave image of a Au nanowire with a spatial resolution of 170 nm. Moreover, based on the analytical and explicit expressions proposed, M-AFM can implement the quantitative evaluation and characterization of the local conductivity of materials on the nanometer scale.

本文言語English
論文番号016602
ジャーナルApplied Physics Express
5
1
DOI
出版ステータスPublished - 2012 1月
外部発表はい

ASJC Scopus subject areas

  • 工学(全般)
  • 物理学および天文学(全般)

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