Mn-doping effect on optical absorption of Pb(Zr,Ti)O3 films prepared by aerosol deposition

Hiroki Tsuda, Masafumi Nakada, Jun Akedo, Keishi Ohashi

研究成果: Conference contribution

抄録

The Mn-doping effect on the optical absorption of ferroelectric lead zirconate titanate [PZT, Pb(Zr,Ti)O3] films prepared on glass substrates at room temperature by aerosol deposition (AD) were investigated. The optical reflectance and transmittance of the undoped PZT and Mn-doped PZT films were measured in the wavelength range from ultraviolet to near infrared (UV-NIR) and the measured optical spectra were analyzed. The optical absorption of the undoped PZT films was found to be larger than that of the Mn-doped PZT films in the near infrared wavelength range although the analyzed results indicated similar structure for both the undoped PZT and Mn-doped PZT films. Less optical loss and fine dense PZT films with Mn-doping can be deposited by AD at low process temperature.

本文言語English
ホスト出版物のタイトル4th IMAPS/ACerS International Conference and Exhibition on Ceramic Interconnect and Ceramic Microsystems Technologies 2008, CICMT 2008
ページ475-477
ページ数3
出版ステータスPublished - 2008 12 1
外部発表はい
イベント4th International Conference on Ceramic Interconnect and Ceramic Microsystems Technologies, CICMT 2008 - Munich, Germany
継続期間: 2008 4 212008 4 24

出版物シリーズ

名前4th IMAPS/ACerS International Conference and Exhibition on Ceramic Interconnect and Ceramic Microsystems Technologies 2008, CICMT 2008

Other

Other4th International Conference on Ceramic Interconnect and Ceramic Microsystems Technologies, CICMT 2008
国/地域Germany
CityMunich
Period08/4/2108/4/24

ASJC Scopus subject areas

  • ハードウェアとアーキテクチャ
  • セラミックおよび複合材料

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