Monte Carlo calculation approach to quantitative Auger electron spectroscopy

Shingo Ichimura, Mikio Aratama, Ryuichi Shimizu

研究成果: Article査読

74 被引用数 (Scopus)

抄録

A Monte Carlo calculation technique based on both the partial wave expansion method for elastic scattering and Krefting and Reimer's treatment for inelastic scattering was applied for quantitative study by Auger electron spectroscopy. The theory has described the experiment of energy and angular distributions of backscattered electrons with considerable success. Dependence of the Auger signal generation on primary electron energy was investigated with a scanning Auger electron microscope, and the result was compared with the theory for a number of elements of practical interest. Through this, we have found that the present Monte Carlo approach allows us to evaluate contributions of backscattered electrons to Auger signal generation leading to more comprehensive quantitative AES study.

本文言語English
ページ(範囲)2853-2860
ページ数8
ジャーナルJournal of Applied Physics
51
5
DOI
出版ステータスPublished - 1980
外部発表はい

ASJC Scopus subject areas

  • Physics and Astronomy(all)

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