Multilayered shear wave resonator consisting of c-axis tilted ZnO films

Naoki Morisato*, Shinji Takayanagi, Takahiko Yanagitani, Mami Matsukawa, Yoshiaki Watanabe

*この研究の対応する著者

研究成果: Conference contribution

1 被引用数 (Scopus)

抄録

Multilayer resonator consisting of six layered ZnO films was fabricated using RF magnetron sputtering. To prevent degradation of crystalline orientation, SiO2 buffer layers were inserted between each ZnO layer. The influences of the method for SiO2 deposition on the crystalline orientation also have been investigated. Crystalline orientation of the c-axis tilted ZnO films were confirmed by XRD pole figure analysis and SEM images. In the sixth order mode shear mode resonant frequency, high efficient shear mode excitation with relatively suppressed extensional mode excitation was observed. More extensional mode suppression is expected by increasing the number of the layer.

本文言語English
ホスト出版物のタイトル2009 IEEE International Ultrasonics Symposium and Short Courses, IUS 2009
出版社Institute of Electrical and Electronics Engineers Inc.
ページ2162-2165
ページ数4
ISBN(印刷版)9781424443895
DOI
出版ステータスPublished - 2009
外部発表はい
イベント2009 IEEE International Ultrasonics Symposium, IUS 2009 - Rome, Italy
継続期間: 2009 9月 202009 9月 23

出版物シリーズ

名前Proceedings - IEEE Ultrasonics Symposium
ISSN(印刷版)1051-0117

Other

Other2009 IEEE International Ultrasonics Symposium, IUS 2009
国/地域Italy
CityRome
Period09/9/2009/9/23

ASJC Scopus subject areas

  • 音響学および超音波学

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