Multiple shear wave roundtrips liquid sensor by c-axis parallel oriented ZnO film/silica glass pipe structure

Shoko Hiyama*, Takahiko Yanagitani, Shinji Takayanagi, Yoshiya Kato, Mami Matsukawa

*この研究の対応する著者

研究成果: Conference contribution

2 被引用数 (Scopus)

抄録

We demonstrated the multiple roundtrips of shear horizontal (SH) waves using IDT/c-axis parallel-oriented (1120) ZnO film/silica glass pipe structure for a high-sensitive liquid sensor. Forth roundtrip was observed in the time response of acoustic waves. The insertion loss of the first lap consisted of two frequency components at 131 MHz and 160-350 MHz. IDT/c-axis parallel-oriented ZnO film/silica glass cylinder structure was also fabricated, but multiple roundtrips were not occurred. Therefore, we considered the waves propagating in the pipe structure as plate type waves, not surface acoustic waves. In addition, the liquid loading characteristics of the pipe structure sensor were measured by immersing inside or outside of the pipe in liquid. Because the insertion loss increases in the pipe structure with pure water loading were relatively small, we can conclude that the waves were SH-type plate wave. Liquid property detections using both outside and inside of the pipe structure sensor are expected.

本文言語English
ホスト出版物のタイトルIEEE International Ultrasonics Symposium, IUS
出版社IEEE Computer Society
ページ765-768
ページ数4
ISBN(電子版)9781479970490
DOI
出版ステータスPublished - 2014 10月 20
外部発表はい
イベント2014 IEEE International Ultrasonics Symposium, IUS 2014 - Chicago, United States
継続期間: 2014 9月 32014 9月 6

出版物シリーズ

名前IEEE International Ultrasonics Symposium, IUS
ISSN(印刷版)1948-5719
ISSN(電子版)1948-5727

Other

Other2014 IEEE International Ultrasonics Symposium, IUS 2014
国/地域United States
CityChicago
Period14/9/314/9/6

ASJC Scopus subject areas

  • 音響学および超音波学

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