An efficient control method of a large number of individually controlled and arrayed pneumatic microvalves is proposed. This method can control (2 n) valve matrix with (2n+2) control pressure lines, where n is bit number. With this method, the number of off-chip valve controller and world-to-chip connector are reduced remarkably. A prototype 24 (16) microvalve array controlled by 2*4+2 (10) control lines is fabricated. Any on-chip valve is switched within 200 msec individually.
|出版ステータス||Published - 2008 1月 1|
|イベント||12th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2008 - San Diego, CA, United States|
継続期間: 2008 10月 12 → 2008 10月 16
|Conference||12th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2008|
|City||San Diego, CA|
|Period||08/10/12 → 08/10/16|
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