It was demonstrated that the nano / microfabrication and functionalization for crosslinked Polytetrafluoroethylene (RX-PTFE) were carried out using focused ion beam (FIB). The fine pattern of the regularly nano-scale square array holes with 300 nm square size were fabricated by FIB direct etching. The fabricated samples were functionalized by post grafting reaction using trapped free radicals induced by FIB irradiation, and the samples were successively sulfonated. The obtained samples were treated by the mixture solution of KOH/KC1 to make potassium form, and observed by FE-SEM with EDX spectroscopy. The signals correspond to potassium atom were detected at the holes in fabricated area of RX-PTFE. On the other hand, the signals of potassium formed sulfonic group were hardly detected at the distance of 10 urn from the hole's center in the fabricated area.
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