Nanofabrication on hydrogen-terminated diamond surfaces by atomic force microscope probe-induced oxidation

Minoru Tachiki; Tohru Fukuda; Kenta Sugata; Hokuto Seo; Hitoshi Umezawa; Hiroshi Kawarada

doi:10.1143/jjap.39.4631

Nanofabrication on hydrogen-terminated diamond surfaces by atomic force microscope probe-induced oxidation

Minoru Tachiki, Tohru Fukuda, Kenta Sugata, Hokuto Seo, Hitoshi Umezawa, Hiroshi Kawarada

基幹理工学部

研究成果 › 査読

51 被引用数 (Scopus)

抄録

Field-assisted local oxidation on a hydrogen-terminated (001) diamond surface was performed using an atomic force microscope (AFM). Anodic oxidation by a surface water meniscus layer is suggested to account for this oxidation process. Through the oxygenated area, Fowler-Nordheim (F-N) tunneling current was observed. The difference in electron affinity between the hydrogen-terminated surface and the oxygenated area was confirmed by scanning electron microscopic (SEM) observations.

本文言語	English
ページ（範囲）	4631-4632
ページ数	2
ジャーナル	Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
巻	39
号	7 B
DOI	https://doi.org/10.1143/jjap.39.4631
出版ステータス	Published - 2000

ASJC Scopus subject areas

工学（全般）
物理学および天文学（全般）

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10.1143/jjap.39.4631

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title = "Nanofabrication on hydrogen-terminated diamond surfaces by atomic force microscope probe-induced oxidation",

abstract = "Field-assisted local oxidation on a hydrogen-terminated (001) diamond surface was performed using an atomic force microscope (AFM). Anodic oxidation by a surface water meniscus layer is suggested to account for this oxidation process. Through the oxygenated area, Fowler-Nordheim (F-N) tunneling current was observed. The difference in electron affinity between the hydrogen-terminated surface and the oxygenated area was confirmed by scanning electron microscopic (SEM) observations.",

keywords = "AFM, Diamond, Electron affinity, Hydrogen termination, SPM, Surface conduction",

author = "Minoru Tachiki and Tohru Fukuda and Kenta Sugata and Hokuto Seo and Hitoshi Umezawa and Hiroshi Kawarada",

year = "2000",

doi = "10.1143/jjap.39.4631",

language = "English",

volume = "39",

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journal = "Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes",

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TY - JOUR

T1 - Nanofabrication on hydrogen-terminated diamond surfaces by atomic force microscope probe-induced oxidation

AU - Tachiki, Minoru

AU - Fukuda, Tohru

AU - Sugata, Kenta

AU - Seo, Hokuto

AU - Umezawa, Hitoshi

AU - Kawarada, Hiroshi

PY - 2000

Y1 - 2000

N2 - Field-assisted local oxidation on a hydrogen-terminated (001) diamond surface was performed using an atomic force microscope (AFM). Anodic oxidation by a surface water meniscus layer is suggested to account for this oxidation process. Through the oxygenated area, Fowler-Nordheim (F-N) tunneling current was observed. The difference in electron affinity between the hydrogen-terminated surface and the oxygenated area was confirmed by scanning electron microscopic (SEM) observations.

AB - Field-assisted local oxidation on a hydrogen-terminated (001) diamond surface was performed using an atomic force microscope (AFM). Anodic oxidation by a surface water meniscus layer is suggested to account for this oxidation process. Through the oxygenated area, Fowler-Nordheim (F-N) tunneling current was observed. The difference in electron affinity between the hydrogen-terminated surface and the oxygenated area was confirmed by scanning electron microscopic (SEM) observations.

KW - AFM

KW - Diamond

KW - Electron affinity

KW - Hydrogen termination

KW - SPM

KW - Surface conduction

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VL - 39

SP - 4631

EP - 4632

JO - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes

JF - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes

SN - 0021-4922

IS - 7 B

ER -

Nanofabrication on hydrogen-terminated diamond surfaces by atomic force microscope probe-induced oxidation

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