Nanofabrication on hydrogen-terminated diamond surfaces by atomic force microscope probe-induced oxidation

Minoru Tachiki, Tohru Fukuda, Kenta Sugata, Hokuto Seo, Hitoshi Umezawa, Hiroshi Kawarada

研究成果査読

51 被引用数 (Scopus)

抄録

Field-assisted local oxidation on a hydrogen-terminated (001) diamond surface was performed using an atomic force microscope (AFM). Anodic oxidation by a surface water meniscus layer is suggested to account for this oxidation process. Through the oxygenated area, Fowler-Nordheim (F-N) tunneling current was observed. The difference in electron affinity between the hydrogen-terminated surface and the oxygenated area was confirmed by scanning electron microscopic (SEM) observations.

本文言語English
ページ(範囲)4631-4632
ページ数2
ジャーナルJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
39
7 B
DOI
出版ステータスPublished - 2000

ASJC Scopus subject areas

  • 工学(全般)
  • 物理学および天文学(全般)

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