Nanostructural evolution in non-epitaxial growth of thin films

Minghui Hu, Suguru Noda, Hiroshi Komiyama

研究成果: Conference contribution

抜粋

The initial growth of non-epitaxial thin films was studied and discussed using the concept that thermodynamics controls the unit-structure within the surface diffusion length of deposits, whereas kinetics controls the ensemble-structure on a large scale. Three basic topics, growth mode (island shape), crystalline (island inner) structure, time-dependent properties of island ensemble (island size, distance, and density), are summarized based on the theoretical investigation of thin film growth of metals on TiO2, and the experimental study of Cu and Cr thin film growth on SiO2. This study provides fundamental understanding of nanostructural control during thin film growth, and further can be applied to various advanced devices for electronics, photonics, catalysis, and energy applications.

元の言語English
ホスト出版物のタイトルNanostructured and Patterned Materials for Information Storage
ページ26-31
ページ数6
出版物ステータスPublished - 2006 12 1
イベント2006 MRS Fall Meeting - Boston, MA, United States
継続期間: 2006 11 272006 11 30

出版物シリーズ

名前Materials Research Society Symposium Proceedings
961
ISSN(印刷物)0272-9172

Other

Other2006 MRS Fall Meeting
United States
Boston, MA
期間06/11/2706/11/30

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

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  • これを引用

    Hu, M., Noda, S., & Komiyama, H. (2006). Nanostructural evolution in non-epitaxial growth of thin films. : Nanostructured and Patterned Materials for Information Storage (pp. 26-31). (Materials Research Society Symposium Proceedings; 巻数 961).