Because of its good mechanical properties and its smooth surface, the bulk metallic glass Zr 46.8Ti 8.2Cu 7.5Ni 10Be 27.5 (V4) is a suitable material for microcomponents under mechanical stress. Since this glass is very stable to crystallization it allows for a near-net shape production of micro-components by forging the glass in the super-plastic state under small load at temperatures above the glass transition. If the V4 glass is pressed in deep-etched Si dies at a pressure of 5 MPa at 653 K or in NiCo dies manufactured according to the UV LIGA process it becomes possible to produce microcomponents up to 500 μm in thickness with detail dimensions of less than 50 μm at a high precision and surface finish.
|寄稿の翻訳タイトル||Near-net shape microcomponents obtained by superplastic forging of bulk metallic glass|
|ジャーナル||Praktische Metallographie/Practical Metallography|
|出版ステータス||Published - 2006 5 1|
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