Non-destructive evaluation of thin ZnO shear wave transducer by Brillouin scattering

Kazuaki Shintani*, Takahiko Yanagitani, Mami Matsukawa, Takahiko Otani

*この研究の対応する著者

研究成果: Conference article査読

13 被引用数 (Scopus)

抄録

Elastic properties of thin ZnO shear wave transducers have been investigated. These transducer films were fabricated by magnetron sputtering. They are almost composed of unidirectional ZnO crystallites, which were confirmed by X-ray diffraction measurements. The elastic properties of the film seem difficult to evaluate by conventional mechanical measurements. We have then applied a Brillouin scattering technique, which enables the measurement of the hypersonic wave velocity in the GHz range. In spite of the thickness of several micrometers and problems with transparency, we have performed the precise measurement of velocity with estimated errors of 0.5%, which was sufficiently small to evaluate the film.

本文言語English
ページ(範囲)1864-1867
ページ数4
ジャーナルProceedings - IEEE Ultrasonics Symposium
3
出版ステータスPublished - 2004 12月 1
外部発表はい
イベント2004 IEEE Ultrasonics Symposium - Montreal, Que., Canada
継続期間: 2004 8月 232004 8月 27

ASJC Scopus subject areas

  • 音響学および超音波学

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