Nonresonant multiphoton ionization of rare gases

Kiyohide Kokubun, Shingo Ichimura, Hiroko Hashizume, Hazime Shimizu, Yoshiro Oowadano, Yuji Matsumoto, Kazuhiro Endo

研究成果: Article査読

14 被引用数 (Scopus)

抄録

For the purpose of applying the laser-ionization method to measuring gas pressure, the dependence of the ionization output signals of rare gases on the gas pressure and the laser intensity were studied using XeCl, KrF, and ArF excimer lasers. The proportional relation between the ionization signal and the gas pressure was experimentally verified to below 10 8 Torr. In the case of Kr gas, the dependence of the ionization signal on the laser intensity was in agreement with the theory of nonresonant multiphoton ionization, and saturation of ionization in the case of Xe was observed.

本文言語English
ページ(範囲)3310-3313
ページ数4
ジャーナルJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
8
4
DOI
出版ステータスPublished - 1990 7
外部発表はい

ASJC Scopus subject areas

  • 凝縮系物理学
  • 表面および界面
  • 表面、皮膜および薄膜

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