抄録
A normally closed microvalve and a micropump are fabricated on a silicon wafer by micro-machining techniques. The normally closed microvalve has a movable silicon diaphragm and a small piezoactuator to drive it. The controllable gas flow rate is from 0.1 ml/min to 85 ml/min at a gas pressure of 0.75 kgf/cm2. The micropump is a diaphragm-type pump, which consists of two polysilicon one-way valves and a diaphragm driven by a small piezoactuator. The maximum pumping flow rate and pressure are 20 μ/min and 780 mmH2O respectively.
本文言語 | English |
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ページ(範囲) | 163-169 |
ページ数 | 7 |
ジャーナル | Sensors and Actuators |
巻 | 20 |
号 | 1-2 |
DOI | |
出版ステータス | Published - 1989 11月 15 |
外部発表 | はい |
ASJC Scopus subject areas
- 工学(全般)