Normally closed microvalve and mircopump fabricated on a silicon wafer

Masayoshi Esashi; Shuichi Shoji; Akira Nakano

doi:10.1016/0250-6874(89)87114-8

Normally closed microvalve and mircopump fabricated on a silicon wafer

Masayoshi Esashi^*, Shuichi Shoji, Akira Nakano

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研究成果: Article › 査読

144 被引用数 (Scopus)

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A normally closed microvalve and a micropump are fabricated on a silicon wafer by micro-machining techniques. The normally closed microvalve has a movable silicon diaphragm and a small piezoactuator to drive it. The controllable gas flow rate is from 0.1 ml/min to 85 ml/min at a gas pressure of 0.75 kgf/cm². The micropump is a diaphragm-type pump, which consists of two polysilicon one-way valves and a diaphragm driven by a small piezoactuator. The maximum pumping flow rate and pressure are 20 μ/min and 780 mmH₂O respectively.

本文言語	English
ページ（範囲）	163-169
ページ数	7
ジャーナル	Sensors and Actuators
巻	20
号	1-2
DOI	https://doi.org/10.1016/0250-6874(89)87114-8
出版ステータス	Published - 1989 11月 15
外部発表	はい

ASJC Scopus subject areas

工学（全般）

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10.1016/0250-6874(89)87114-8

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abstract = "A normally closed microvalve and a micropump are fabricated on a silicon wafer by micro-machining techniques. The normally closed microvalve has a movable silicon diaphragm and a small piezoactuator to drive it. The controllable gas flow rate is from 0.1 ml/min to 85 ml/min at a gas pressure of 0.75 kgf/cm2. The micropump is a diaphragm-type pump, which consists of two polysilicon one-way valves and a diaphragm driven by a small piezoactuator. The maximum pumping flow rate and pressure are 20 μ/min and 780 mmH2O respectively.",

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AU - Shoji, Shuichi

AU - Nakano, Akira

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N2 - A normally closed microvalve and a micropump are fabricated on a silicon wafer by micro-machining techniques. The normally closed microvalve has a movable silicon diaphragm and a small piezoactuator to drive it. The controllable gas flow rate is from 0.1 ml/min to 85 ml/min at a gas pressure of 0.75 kgf/cm2. The micropump is a diaphragm-type pump, which consists of two polysilicon one-way valves and a diaphragm driven by a small piezoactuator. The maximum pumping flow rate and pressure are 20 μ/min and 780 mmH2O respectively.

AB - A normally closed microvalve and a micropump are fabricated on a silicon wafer by micro-machining techniques. The normally closed microvalve has a movable silicon diaphragm and a small piezoactuator to drive it. The controllable gas flow rate is from 0.1 ml/min to 85 ml/min at a gas pressure of 0.75 kgf/cm2. The micropump is a diaphragm-type pump, which consists of two polysilicon one-way valves and a diaphragm driven by a small piezoactuator. The maximum pumping flow rate and pressure are 20 μ/min and 780 mmH2O respectively.

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JO - Sensors and Actuators

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Normally closed microvalve and mircopump fabricated on a silicon wafer

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