Notice of Removal: Film growth of c-axis parallel oriented ZnO on entire surface of silica glass pipe for SH-SAW pipe sensor

Yuta Takamura, Shinji Takayanagi, Mami Matsukawa, Chizu Ishida, Takahiko Yanagitani

研究成果: Conference contribution

抄録

SH-SAW is suitable for liquid sensors to measure conductivity and viscosity because it can propagate without the energy leakage into liquid. We have fabricated a SH-SAW sensor consisting of a c-axis parallel (11-20) oriented ZnO film on a silica glass plate [1]. On the other hand, the long-distance propagation is necessary in order to detect the small changes of the velocity and amplitude. One way to increase propagation distance is wave multiple roundtrips around the sensor. In previous study, the c-axis parallel oriented ZnO film was grown on a part of the glass pipe surface and the SH-BAW roundtrips were demonstrated [2]. However, the SH-SAW roundtrips were not observed because the ZnO film was not grown on the entire surface of the pipe. In this study, we demonstrated the entirepipe-surface deposition of c-axis parallel oriented ZnO film to obtain SH-SAW pipe sensor.

本文言語English
ホスト出版物のタイトル2017 IEEE International Ultrasonics Symposium, IUS 2017
出版社IEEE Computer Society
ISBN(電子版)9781538633830
DOI
出版ステータスPublished - 2017 10月 31
イベント2017 IEEE International Ultrasonics Symposium, IUS 2017 - Washington, United States
継続期間: 2017 9月 62017 9月 9

出版物シリーズ

名前IEEE International Ultrasonics Symposium, IUS
0
ISSN(印刷版)1948-5719
ISSN(電子版)1948-5727

Other

Other2017 IEEE International Ultrasonics Symposium, IUS 2017
国/地域United States
CityWashington
Period17/9/617/9/9

ASJC Scopus subject areas

  • 音響学および超音波学

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