Nucleation of Cu2Te layer by a closed space sublimation method toward the growth of Te based chalcopyrite

Yohei Sakurakawa, Aya Uruno, Masakazu Kobayashi

    研究成果: Article査読

    3 被引用数 (Scopus)


    Nucleation of Cu-Te layers was performed by the closed space sublimation method using various source materials, source temperatures, and Si substrates with different surface orientations. The objective was to produce nuclei layers with high quality for use as nucleation centers for CuGaTe2. The grown samples were evaluated by x-ray diffraction and scanning electron microscopy. Cu2Te deposits were obtained using either a CuTe or Cu2Te source, but the latter gave a higher area coverage of Cu2Te nuclei. Highly oriented nuclei were obtained when they were grown on Si (001) at a source temperature of 640 °C and substrate temperature of 590 °C. When the source temperature was raised to 750 °C and the corresponding substrate temperature was 700 °C, nonuniform but highly oriented nuclei were obtained. Both nuclei layers exhibited a strong preference for (0001) orientation. The crystallographic features of the Cu2Te nuclei formed on Si (111) were similar to those of the Cu2Te nuclei formed on Si (001).

    ジャーナルJournal of Vacuum Science and Technology B: Nanotechnology and Microelectronics
    出版ステータスPublished - 2017 7 1

    ASJC Scopus subject areas

    • 電子材料、光学材料、および磁性材料
    • 器械工学
    • プロセス化学およびプロセス工学
    • 表面、皮膜および薄膜
    • 電子工学および電気工学
    • 材料化学


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