Oblique incidence ultrasonic reflectometry device based on c-axis tilted ScAlN films for evaluating viscoelastic properties of liquids above 100 MHz

Sarina Kinoshita, Takahiko Yanagitani*

*この研究の対応する著者

研究成果: Article査読

抄録

The ultrasonic complex reflectometry is a powerful tool for evaluating the viscoelastic properties of small liquid samples. However, the shear mode reflectometry device has not been used at frequencies above 100 MHz because shear-mode piezoelectric films are difficult to obtain at such frequencies. Here, the oblique incidence reflectometry with 143 MHz quasi-shear waves excited by c-axis tilted ScAlN thin films was proposed to realize high-sensitivity evaluation of the viscoelastic properties of liquids. Using the prism type reflectometry MEMS, the shear elasticity and shear viscosity of glycerin solutions were estimated from their complex reflection coefficients.

本文言語English
論文番号152901
ジャーナルApplied Physics Letters
121
15
DOI
出版ステータスPublished - 2022 10月 10

ASJC Scopus subject areas

  • 物理学および天文学(その他)

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