Observation of Ferroelectricity in Very Thin Vinylidene Fluoride Trifluoroethylene Copolymer[P(VDF·TrFE)] Films by High Frequency C-V Measurements of Al-SiO2-P(VDF·TrFE)-SiO2-Si Capacitors

Noriyoshi Yamauchi, Kinya Kato, Tsutomu Wada

研究成果: Article

15 引用 (Scopus)

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MIS capacitors with Al–SiO2–P(VDF·TrFE)–SiO2–Si structure were fabricated depositing P(VDF·TrFE) film by a spin coating method to investigate properties of very thin ferroelectric polymer films. By sand wiching the polymer film with SiO2 films, application of an electrical field high enough for ferroelectricity measurement in several tens nm thick P(VDF·TrFE) films became possible. It is revealed that P(VDF·TrFE) film as thin as 32nm shows ferroelectricity by high frequency C-V measurements of the capacitors.

元の言語English
ページ(範囲)L671-L673
ジャーナルJapanese journal of applied physics
23
発行部数9
DOI
出版物ステータスPublished - 1984 9

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ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

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