Observation of Ferroelectricity in Very Thin Vinylidene Fluoride Trifluoroethylene Copolymer[P(VDF·TrFE)] Films by High Frequency C-V Measurements of Al-SiO2-P(VDF·TrFE)-SiO2-Si Capacitors

Noriyoshi Yamauchi*, Kinya Kato, Tsutomu Wada

*この研究の対応する著者

研究成果: Article査読

15 被引用数 (Scopus)

抄録

MIS capacitors with Al–SiO2–P(VDF·TrFE)–SiO2–Si structure were fabricated depositing P(VDF·TrFE) film by a spin coating method to investigate properties of very thin ferroelectric polymer films. By sand wiching the polymer film with SiO2 films, application of an electrical field high enough for ferroelectricity measurement in several tens nm thick P(VDF·TrFE) films became possible. It is revealed that P(VDF·TrFE) film as thin as 32nm shows ferroelectricity by high frequency C-V measurements of the capacitors.

本文言語English
ページ(範囲)L671-L673
ジャーナルJapanese journal of applied physics
23
9
DOI
出版ステータスPublished - 1984 9
外部発表はい

ASJC Scopus subject areas

  • 工学(全般)
  • 物理学および天文学(全般)

フィンガープリント

「Observation of Ferroelectricity in Very Thin Vinylidene Fluoride Trifluoroethylene Copolymer[P(VDF·TrFE)] Films by High Frequency C-V Measurements of Al-SiO<sub>2</sub>-P(VDF·TrFE)-SiO<sub>2</sub>-Si Capacitors」の研究トピックを掘り下げます。これらがまとまってユニークなフィンガープリントを構成します。

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