Ohmic contact for silicon carbide by carbon nanotubes

Masafumi Inaba*, Kazuma Suzuki, Yu Hirano, Wataru Norimatsu, Michiko Kusunoki, Hiroshi Kawarada

*この研究の対応する著者

研究成果: Conference contribution

1 被引用数 (Scopus)

抄録

The electrical contact properties of silicon carbide (SiC) and carbon nanotubes (CNTs) were measured by conductive atomic force microscopy (C-AFM). A CNT forest was synthesized by SiC surface decomposition. Trenches, which electrically separate the conduction area, were fabricated using a focused ion beam (FIB) without a cover layer, and the resistance of each island was measured by C-AFM. From the dependence of the resistance on the CNT forest island size, the contact resistance between the CNTs and the SiC substrate was measured. By varying the dopant density in the SiC substrate, the Schottky barrier height was evaluated to be ~0.5 eV. This is slightly higher than a previously reported result obtained from a similar setup with a metal covering the CNT forest. We assumed that the damaged region existed in the islands, which is due to the trench formation by the FIB. The commensurate barrier height was obtained with the length of the damaged region assumed to be ~3 μm. Here, we could estimate the resistivity of a CNT/SiC interface without a cover layer. This indicates that a CNT forest on SiC is useful as a brief contact electrode.

本文言語English
ホスト出版物のタイトルSilicon Carbide and Related Materials 2015
編集者Fabrizio Roccaforte, Filippo Giannazzo, Francesco La Via, Roberta Nipoti, Danilo Crippa, Mario Saggio
出版社Trans Tech Publications Ltd
ページ561-564
ページ数4
ISBN(印刷版)9783035710427
DOI
出版ステータスPublished - 2016
イベント16th International Conference on Silicon Carbide and Related Materials, ICSCRM 2015 - Sicily, Italy
継続期間: 2015 10 42015 10 9

出版物シリーズ

名前Materials Science Forum
858
ISSN(印刷版)0255-5476
ISSN(電子版)1662-9752

Other

Other16th International Conference on Silicon Carbide and Related Materials, ICSCRM 2015
国/地域Italy
CitySicily
Period15/10/415/10/9

ASJC Scopus subject areas

  • 材料科学(全般)
  • 凝縮系物理学
  • 材料力学
  • 機械工学

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