On the length of THRU standard for TRL de-embedding on Si substrate above 110 GHz

A. Orii, M. Suizu, S. Amakawa, K. Katayama, K. Takano, M. Motoyoshi, T. Yoshida, M. Fujishima

研究成果: Conference contribution

15 被引用数 (Scopus)

抄録

It is known that the THRU standard (a transmission line) used for thru-reflect-line (TRL) calibration/de-embedding for S-parameter measurement has to be long enough that only a single electromagnetic mode propagates at its center for it to work reliably. But ideally, TRL standards should occupy as little precious silicon real estate as possible. This paper attempts to experimentally find out how long a THRU is long enough above 110GHz up to 170 GHz through measurements of transmission lines of various lengths. The results indicate that the length of a THRU should be at least 400 micrometers, excluding pads and pad-to-line transitions.

本文言語English
ホスト出版物のタイトル2013 IEEE International Conference on Microelectronic Test Structures, ICMTS 2013 - Conference Proceedings
ページ81-86
ページ数6
DOI
出版ステータスPublished - 2013
外部発表はい
イベント2013 International Conference on Microelectronic Test Structures, ICMTS 2013 - Osaka, Japan
継続期間: 2013 3月 252013 3月 28

出版物シリーズ

名前IEEE International Conference on Microelectronic Test Structures

Other

Other2013 International Conference on Microelectronic Test Structures, ICMTS 2013
国/地域Japan
CityOsaka
Period13/3/2513/3/28

ASJC Scopus subject areas

  • 電子工学および電気工学

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