Optical waveguide resonator for one-port refractive index sensing

N. Fujiwara, H. Okayama, H. Irikawa, T. Ooka, M. Tsutsui, H. Nakajima

    研究成果: Conference contribution

    抄録

    We report an optical waveguide sensor using ring resonator. A refractive index sensor using resonator with vertical light input will be described. A grating coupler is used to couple the light beam to waveguide and output the light beam. The device has diameter of 40 μm with 500 nm wide waveguide, and fabricated in silicon on insulator (SOI). Experiments show that it has 313 nm/RIU sensitivity and detection limit of 1.5×10-3 RIU for changes in the refractive index of the sample.

    本文言語English
    ホスト出版物のタイトルTechnical Digest of the 18th Microoptics Conference, MOC 2013
    出版ステータスPublished - 2013
    イベント2013 18th Microoptics Conference, MOC 2013 - Tokyo
    継続期間: 2013 10 272013 10 30

    Other

    Other2013 18th Microoptics Conference, MOC 2013
    CityTokyo
    Period13/10/2713/10/30

    ASJC Scopus subject areas

    • 電子材料、光学材料、および磁性材料

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