Optimization of the tip of microwave AFM probe

Yang Ju, Motohiro Hamada, Atsushi Hosoi, Akifumi Fujimoto

研究成果: Conference contribution

1 被引用数 (Scopus)


In order to develop a new structure microwave probe, the fabrication of the atomic force microscope (AFM) probe on a GaAs wafer was studied. The fabricated probe had a tip of 8 μ m high and curvature radius approximately 30 nm. The dimensions of the cantilever are 250x30x15 μm. A waveguide was introduced by evaporating Au film on the top and bottom surfaces of the GaAs AFM probe. The open structure of the waveguide at the tip of the probe was introduced by using focused ion beam (FIB) fabrication. To improve the resolution of AFM measurement, only the metal film was removed at the end of the probe tip. AFM topography of a grating sample was measured by the fabricated probe. As a result, it was found that the resolution of AFM measurement and the ratio of signal to noise were enhanced.

ホスト出版物のタイトルProceedings of the ASME InterPack Conference 2009, IPACK2009
出版ステータスPublished - 2010 6 25
イベント2009 ASME InterPack Conference, IPACK2009 - San Francisco, CA, United States
継続期間: 2009 7 192009 7 23


名前Proceedings of the ASME InterPack Conference 2009, IPACK2009


Conference2009 ASME InterPack Conference, IPACK2009
CountryUnited States
CitySan Francisco, CA

ASJC Scopus subject areas

  • Hardware and Architecture
  • Electrical and Electronic Engineering

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