Organosilane self-assembled monolayer-modified field effect transistors for on-chip ion and biomolecule sensing

Daisuke Niwa, Kaoru Omichi, Norikazu Motohashi, Takayuki Homma, Tetsuya Osaka*

*この研究の対応する著者

研究成果: Article査読

44 被引用数 (Scopus)

抄録

Field effect transistors (FETs) modified with various functional monolayers, such as organosilane monolayer, were formed on the identical substrate by precise control of the fabrication processes. The devices showed a typical transistor property with a good stability in aqueous solutions. The amino monolayer-modified FET acted as an ion sensitive FET with a good pH sensitivity of 58 mV/pH, and the perfluoro-alkyl monolayer-modified FET worked as a reference device. Moreover, the device with enzyme immobilized onto amino modified gate electrode enabled to detect trace concentration (10-9 to 10-6 M) of urea with a high sensitivity of 64 mV/decade. These monolayer-modified devices were expected to be applied as working and reference electrodes for on-chip ion and biosensing.

本文言語English
ページ(範囲)721-726
ページ数6
ジャーナルSensors and Actuators, B: Chemical
108
1-2 SPEC. ISS.
DOI
出版ステータスPublished - 2005 7月 22

ASJC Scopus subject areas

  • 電子材料、光学材料、および磁性材料
  • 器械工学
  • 凝縮系物理学
  • 表面、皮膜および薄膜
  • 金属および合金
  • 電子工学および電気工学
  • 材料化学

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