TY - JOUR
T1 - Organosilane self-assembled monolayer-modified field effect transistors for on-chip ion and biomolecule sensing
AU - Niwa, Daisuke
AU - Omichi, Kaoru
AU - Motohashi, Norikazu
AU - Homma, Takayuki
AU - Osaka, Tetsuya
PY - 2005/7/22
Y1 - 2005/7/22
N2 - Field effect transistors (FETs) modified with various functional monolayers, such as organosilane monolayer, were formed on the identical substrate by precise control of the fabrication processes. The devices showed a typical transistor property with a good stability in aqueous solutions. The amino monolayer-modified FET acted as an ion sensitive FET with a good pH sensitivity of 58 mV/pH, and the perfluoro-alkyl monolayer-modified FET worked as a reference device. Moreover, the device with enzyme immobilized onto amino modified gate electrode enabled to detect trace concentration (10-9 to 10-6 M) of urea with a high sensitivity of 64 mV/decade. These monolayer-modified devices were expected to be applied as working and reference electrodes for on-chip ion and biosensing.
AB - Field effect transistors (FETs) modified with various functional monolayers, such as organosilane monolayer, were formed on the identical substrate by precise control of the fabrication processes. The devices showed a typical transistor property with a good stability in aqueous solutions. The amino monolayer-modified FET acted as an ion sensitive FET with a good pH sensitivity of 58 mV/pH, and the perfluoro-alkyl monolayer-modified FET worked as a reference device. Moreover, the device with enzyme immobilized onto amino modified gate electrode enabled to detect trace concentration (10-9 to 10-6 M) of urea with a high sensitivity of 64 mV/decade. These monolayer-modified devices were expected to be applied as working and reference electrodes for on-chip ion and biosensing.
KW - Field effect transistor
KW - Ion and biomolecule detection
KW - On-chip biosensing device
KW - Reference device
KW - Self-assembled monolayer
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U2 - 10.1016/j.snb.2004.11.055
DO - 10.1016/j.snb.2004.11.055
M3 - Article
AN - SCOPUS:19744363322
VL - 108
SP - 721
EP - 726
JO - Sensors and Actuators, B: Chemical
JF - Sensors and Actuators, B: Chemical
SN - 0925-4005
IS - 1-2 SPEC. ISS.
ER -