Orientation control of Sr0.7Bi2.3Ta2O9+α thin films by chemical liquid deposition

Ichiro Koiwa*, Takao Kanehara, Juro Mita, Toshiyuki Iwabuchi, Tetsuya Osaka, Sachiko Ono

*この研究の対応する著者

研究成果: Article査読

26 被引用数 (Scopus)

抄録

The orientation of Sr0.7Bi2.3Ta2O9+α (SBT) films, which are layer-type bismuth compounds, was controlled by varying the Sr-source. In this paper, the effect of crystal orientation on film characteristics is described. The crystal orientation of the SBT ferroelectric films did not affect the surface morphology, leakage current or fatigue characteristics, but it did affect the shape of the hysteresis loop (polarization) and the window value of the C-V characteristics when the films were connected to a metal-oxide-semiconductor (MOS) diode. Although a complete c-axis orientation film with a stoichiometry of SrBi2Ta2O9 shows no spontaneous polarization in general, the highly c-axis orientated Sr0.7Bi2.3Ta2O9+α film in this study showed some spontaneous polarization. The polarization values are larger than the expected by considering orientation alone. A deviation from stoichiometry resulted in an increase made in the polarization along the c-axis. Therefore, control of the crystal orientation and composition of SBT films is quite an important factor in actual applications.

本文言語English
ページ(範囲)1597-1601
ページ数5
ジャーナルJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
36
3 SUPPL. B
DOI
出版ステータスPublished - 1997 3月

ASJC Scopus subject areas

  • 工学(全般)
  • 物理学および天文学(全般)

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