Overview and future challenges of floating body RAM (FBRAM) technology for 32 nm technology node and beyond

Takeshi Hamamoto; Takashi Ohsawa

doi:10.1016/j.sse.2009.03.010

Overview and future challenges of floating body RAM (FBRAM) technology for 32 nm technology node and beyond

Takeshi Hamamoto^*, Takashi Ohsawa

^*この研究の対応する著者

研究成果: Article › 査読

19 被引用数 (Scopus)

抄録

Floating body cell (FBC) is a one-transistor memory cell on SOI substrate aimed at high-density embedded memory on SOC. In order to verify this memory cell technology, a 128 Mb floating body RAM (FBRAM) with FBC has been designed and successfully developed. The memory cell design and the experimental results, including single-cell operation, are reviewed. Based on the experimental results, the scalability of FBC down to 32 nm technology node is also discussed.

本文言語	English
ページ（範囲）	676-683
ページ数	8
ジャーナル	Solid-State Electronics
巻	53
号	7
DOI	https://doi.org/10.1016/j.sse.2009.03.010
出版ステータス	Published - 2009 7月
外部発表	はい

ASJC Scopus subject areas

電子材料、光学材料、および磁性材料
凝縮系物理学
電子工学および電気工学
材料化学

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10.1016/j.sse.2009.03.010

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N2 - Floating body cell (FBC) is a one-transistor memory cell on SOI substrate aimed at high-density embedded memory on SOC. In order to verify this memory cell technology, a 128 Mb floating body RAM (FBRAM) with FBC has been designed and successfully developed. The memory cell design and the experimental results, including single-cell operation, are reviewed. Based on the experimental results, the scalability of FBC down to 32 nm technology node is also discussed.

AB - Floating body cell (FBC) is a one-transistor memory cell on SOI substrate aimed at high-density embedded memory on SOC. In order to verify this memory cell technology, a 128 Mb floating body RAM (FBRAM) with FBC has been designed and successfully developed. The memory cell design and the experimental results, including single-cell operation, are reviewed. Based on the experimental results, the scalability of FBC down to 32 nm technology node is also discussed.

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KW - MOSFETs

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Overview and future challenges of floating body RAM (FBRAM) technology for 32 nm technology node and beyond

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ASJC Scopus subject areas

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