抄録
Floating body cell (FBC) is a one-transistor memory cell on SOI substrate aimed at high-density embedded memory on SOC. In order to verify this memory cell technology, a 128 Mb floating body RAM (FBRAM) with FBC has been designed and successfully developed. The memory cell design and the experimental results, including single-cell operation, are reviewed. Based on the experimental results, the scalability of FBC down to 32 nm technology node is also discussed.
本文言語 | English |
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ページ(範囲) | 676-683 |
ページ数 | 8 |
ジャーナル | Solid-State Electronics |
巻 | 53 |
号 | 7 |
DOI | |
出版ステータス | Published - 2009 7月 |
外部発表 | はい |
ASJC Scopus subject areas
- 電子材料、光学材料、および磁性材料
- 凝縮系物理学
- 電子工学および電気工学
- 材料化学