Oxidation in preparation of oxide superconducting films by MBE using NO2 and O3 gases

H. Nonaka*, T. Shimizu, S. Hosokawa, S. Ichimura, K. Arai

*この研究の対応する著者

研究成果: Article査読

16 被引用数 (Scopus)

抄録

In order to prepare oxide superconducting films by molecular beam epitaxy (MBE), we developed a compact NO2 supersonic molecular beam source and a new ozone jet generator to supply oxidizing gases with high controllability. Using these sources, oxide superconducting films of REBa2Cu3Ox (RE  Nd, Y) were prepared on either MgO or SrTiO3 substrates. Because of the sufficiently low pressure during deposition, the oxidation process of the metals, especially of copper, by the oxidizing gases and the crystallization and surface flatness of the films were studied in situ by XPS and reflection high‐energy electron diffraction (RHEED) together with effective cleaning of the substrates by the oxidizing gases.

本文言語English
ページ(範囲)353-357
ページ数5
ジャーナルSurface and Interface Analysis
19
1-12
DOI
出版ステータスPublished - 1992 6月
外部発表はい

ASJC Scopus subject areas

  • 化学 (全般)
  • 凝縮系物理学
  • 表面および界面
  • 表面、皮膜および薄膜
  • 材料化学

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