Ozone concentration measurement of O2-O3 binary gas with two types of pressure gauges

Akira Kurokawa*, Sonoko Tsukahara, Takichi Kobayashi, Hisao Hojyo, Shingo Ichimura


研究成果: Article査読

1 被引用数 (Scopus)


A concentration measuring method for a binary gas system, which was based on the viscosity measurement, was investigated. The method utilizes two types of pressure gauges, a capacitance manometer which depends just on pressure and a quartz friction pressure gauge which depends on both viscosity and pressure of a binary gas. The concentration of the binary gas can be estimated from the viscosity because the viscosity is given as a function of concentration of the binary gas. Firstly we applied the pressures-observing system to evaluate concentration of ozone in an O3/O2 gas mixture. The results indicated that this method allows a concentration measurement of ozone with an accuracy of Δ Cozone = 0.2 vol%, near atmospheric pressure. Secondly, we used an impedance measurement system of a quartz oscillator and we estimated the accuracy at A Cozone = 0.05 vol%.

ジャーナルShinku/Journal of the Vacuum Society of Japan
出版ステータスPublished - 2004

ASJC Scopus subject areas

  • 凝縮系物理学
  • 表面、皮膜および薄膜
  • 電子工学および電気工学


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