Partial-pressure measurement of atmospheric-pressure binary gas using two pressure gauges

Akira Kurokawa*, Kenji Odaka, Shingo Ichimura

*この研究の対応する著者

研究成果: Conference article査読

16 被引用数 (Scopus)

抄録

We investigated a new method to measure the partial pressure of a binary gas system at near-atmospheric pressure conditions. The method utilizes two types of vacuum gauges, a capacitance manometer and a quartz friction pressure gauge. The partial pressure of the binary gas can be estimated by measuring the impedance change with a quartz friction pressure gauge, which depends on both viscosity and total pressure of a binary gas, and considering the total pressure change as measured by a capacitance manometer. We applied this method to measure the partial pressure of ozone in an ozone-oxygen gas mixture. The results suggested that the new method allows a partial-pressure measurement of ozone with an accuracy of Δp=0.2kPa, close to atmospheric pressure. The advantages of the new method include compact size, high safety standards when measuring highly reactive gases, and the allowance for in-line monitoring.

本文言語English
ページ(範囲)301-304
ページ数4
ジャーナルVacuum
73
2
DOI
出版ステータスPublished - 2004 3月 19
外部発表はい
イベントProceedings of the European Vacuum Congress Berlin 2003 - Berlin, Germany
継続期間: 2003 6月 232003 6月 26

ASJC Scopus subject areas

  • 器械工学
  • 凝縮系物理学
  • 表面、皮膜および薄膜

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